| 摘要 |
<p>A substrate transfer apparatus, a substrate processing apparatus and a substrate processing method are provided to reduce the whole foot-print by transferring a substrate using a moving unit as a buffer space. A substrate transfer apparatus includes a chamber, a moving unit and a transfer robot. The moving unit(620) is arranged at an upper portion of the chamber. The moving unit is used for supporting a substrate transmitted from the outside and moving the substrate up and down. The transfer robot(610) is arranged at a lower portion of the chamber. The transfer robot is opposite to the moving unit. The transfer robot is used for receiving the substrate from the moving unit and transferring the substrate to the outside. The moving unit is composed of a driving part and a moving part. The moving part is controlled by the driving part. The moving part is used for supporting the substrate and moving the substrate up and down.</p> |
