发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, PROCESS FOR ITS PREPARATION, AND SEMICONDUCTOR DEVICES
摘要 The present invention provides a positive photosensitive resin composition of high sensitivity which can form a pattern of high resolution and high residual film ratio and which can give a cured film superior in mechanical properties, adhesivity and water absorptivity. That is, the present invention lies in a positive photosensitive resin composition comprising 100 parts by weight of an alkali-soluble resin, 1 to 100 parts by weight of a photosensitive diazoquinone compound (B) and a filler (C), characterized in that content F of the filler (C) represented by the following formula is 2 to 70% by weight: <DF>F = filler (C) / Äalkali-soluble resin + filler (C)Ü </DF> <IMAGE>
申请公布号 KR100766648(B1) 申请公布日期 2007.10.15
申请号 KR20037005975 申请日期 2003.04.29
申请人 发明人
分类号 G03F7/023 主分类号 G03F7/023
代理机构 代理人
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