APPARATUS FOR EXTRACTING A PAPER FROM A GLASS SUBSTRATE
摘要
An apparatus for extracting a paper from a glass substrate is provided to prevent a member of carrying a paper from colliding with a glass substrate by preventing overlap of movement paths between a glass substrate taken out from a substrate loading table and a paper to be removed. A paper taking out unit(110) separates a paper from a glass substrate taken out with a substrate conveying robot by vacuum-absorbing an upper end of the paper exposed from the glass substrate. The paper taking out unit conveys the paper separated from the glass substrate in an upward direction. A paper stacking table(120) is disposed over a substrate loading table. The paper conveyed by the paper taking out unit in an upward direction is transferred to a paper stacking unit(130). The paper stacking unit vacuum-absorbs the transferred paper and horizontally moves the paper along an upper surface of the paper stacking table to stack on the paper stacking table.