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发明名称
ANLAGE ZUM BEHANDELN VON SUBSTRATEN
摘要
申请公布号
AT374847(T)
申请公布日期
2007.10.15
申请号
AT20030076554T
申请日期
2003.05.20
申请人
OTB GROUP B.V.
发明人
EVERS, MARINUS FRANCISCUS JOHANUS;BRIER, PETER;CLIJSEN, LEONARDUS PETERUS MARIA
分类号
B65G49/07;C23C14/56;H01L21/00;H01L21/677
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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