MANUFACTURING METHOD FOR PROBE HEAD AND WIRE WOUNDING STRUCTURE FOR THE METHOD

摘要

A method for manufacturing a probe head and a winding structure therefor are provided to overcome a limitation of a conducting current quantity by manufacturing the probe head having probe arrays which are repeatedly formed. A method for manufacturing a probe head uses a winding structure having a slit array formed on an upper end of left/right side walls of a hollow unit of which an upper plane is opened. The method includes the steps of: winding a wire around slits of a slit array(S410); injecting and hardening a silicon into the hollow unit so that the wound wire is buried(S430); and separating a silicon forming body from the hollow unit(S440); slicing the silicon forming body with a predetermined thickness in the perpendicular direction to the winding direction(S450). The slit array is composed of slits having a single depth.