| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin-film electron source with a lower part electrode, an insulating layer, and an upper part electrode laminated in this order, and made degradation of the insulating layer hardly occurred. <P>SOLUTION: The thin-film electron source in a display device is provided with an upper electrode 11 formed as a tree-layer structure of an interface layer 16, an intermediate layer 17 and a surface layer 18 from an insulating layer 12 side, and sublimation enthalpy of a middle layer material is made to be greater than that of the surface layer and yet less than that of the interface layer, or the surface layer may be omitted providing two-layer structure. With this, an image display device with a long life and high luminance or an electron beam lithography system with high speed can be realized. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
