| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical control element having a single-mode waveguide in the optical control element with a ridge type waveguide, especially to stably manufacture and provide an accurate optical control element having the single-mode waveguide even if a substrate is a sheet of 10μm or less in thickness. <P>SOLUTION: In the optical control element with the substrate 1 having an optical waveguide formed thereon, the substrate is a sheet of 10μm or less in thickness, and at least a part of the optical waveguide is the ridge type waveguide 21, having a trench 20 of 10μm width on both sides of at least a part of the ridge type waveguide, and is characterized by having a tapered waveguide (area B) which continuously varies an optical propagation mode of the waveguide between a single-mode and a multi-mode by continuously varying the width or depth of the waveguide. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
