| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to cut a desired fuse securely and very simply without causing the increase of process despite the sufficiently thick formation of a protecting film covering a fuse. SOLUTION: First, a first laser light of short pulse width adjusted to be a short wave length suited to the absorption to a protection film 24 is irradiated to the portion corresponding to a fuse 22 of the protection film 2, a first aperture 24a of the radius R1 is formed in the protection film 24 so that the film thickness is optimum for cutting the fuse 22. Subsequently, to the inside of the aperture 24a, the laser light of long pulse width adjusted to be a long wave length suited to the absorption to the fuse 22 is irradiated to cut the fuse 22. COPYRIGHT: (C)2008,JPO&INPIT
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