| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of sticking a dicing sheet which can suppress the generation of a gap between the dicing sheet and a laminate. SOLUTION: In this method of sticking a dicing sheet, the dicing sheet 40 is sucked by a sucking surface 14a so that a front end 40a of the dicing sheet 40 protrudes from the sucking surface 14a, and the front end 40a is pressed on a sticking schedule surface 9a of the laminate 9 by a pressure roller 17. Then, after releasing the suction, the entire dicing sheet 40 in a planarized state is conveyed using a sucking force subtly remaining on the sucking surface 14a, and a pressing force of the pressure roller 17 to the sticking schedule surface 9a. Such a technique can suppress the generation of a gap between the stuck dicing sheet 40 and the laminate 9, and thus, chipping of the laminate 9 or cracks in dicing can be suppressed. COPYRIGHT: (C)2008,JPO&INPIT
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