| 摘要 |
PROBLEM TO BE SOLVED: To provide a collet chuck device which stably and precisely centers and fixes a workpiece even when dimensional dispersion of the workpiece is large. SOLUTION: In this collect chuck device 10, an axially moving member 30 is composed of: a first moving member 31 formed with a tapered surface 31a and disposed with a first tapered part 31b facing the Y-direction; and a secondary moving member 32 formed with a tapered surface 32a and disposed with a second tapered part 32b facing the X-direction. The second moving member 32 is fitted to an outer periphery of the first moving member 31. A chuck member 24y abutting on the tapered surface 31a and a chuck member 24z abutting on the tapered surface 32a are dividedly provided by a slit 25a. By vertically moving the first and second moving members 31, 32, the chuck members 24y, 24x are independently expanded or contracted by the tapered surfaces 31a, 32a. COPYRIGHT: (C)2008,JPO&INPIT
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