| 摘要 |
<p>A redundancy fuse is made up of a Cu-Al alloy film and a TiN film covering the surrounding surface of this Cu-Al alloy film. When this fuse is cut, the Cu-Al alloy film in the cut portion thermally diffuses by an abrupt temperature rise, and Al preferentially combines with oxygen because Al is baser than Cu. Al oxidizes in the atmosphere, and AlOx as the stable metal oxide produced sticks to the cut surfaces of the redundancy fuse to form a film in self-alignment. This film functions as a protective film to prevent the generation of corrosion.</p> |
