| 摘要 |
<P>PROBLEM TO BE SOLVED: To stably and precisely control the rotating operation of a θ table. <P>SOLUTION: A stage apparatus 10A has a stage 30 moving on a surface plate 20 and a θ table 40 mounted on the stage 30. The stage 30 has a Y stage 36 moving in a Y direction and an X stage 38 moving in an X direction that is orthogonal to the Y direction. A pivot shaft 80 vertically rises from the upper surface of the X stage 38. This pivot shaft 80 is screwed to the X stage 38 by screws that are not illustrated. At the upper end of this pivot shaft 80, a bearing 82 is attached. On this bearing 82, the θ table 40 and the pivot shaft 80 are pivotally supported, and the θ table 40 is made rotatable in the θz direction. Moreover, there provided are four supports 60 extending in sagging direction from the lower surface of the θ table 40 and an air pad 70 provided at the lower end of each support 60. <P>COPYRIGHT: (C)2008,JPO&INPIT |
