| 摘要 |
PROBLEM TO BE SOLVED: To form a multi X-ray beam excelling in controllability by a small device. SOLUTION: An electron beam (e) generated from a multi electron emission element 15 in a multi-electron beam generation section 12 is subjected to lens action by a lens electrode 19 and accelerated to the level of final potential at the transmission target portion 13 of an anode electrode 20. A multi X-ray beam (x) generated from a target 13 is passed through an X-ray shield plate 23 and an X-ray extraction section 24 in vacuum and extracted into the atmosphere from the X-ray extraction window 27 of a wall portion 25. COPYRIGHT: (C)2008,JPO&INPIT |
