MOLD MEMBER FOR IMPRINT AND METHOD OF MANUFACTURING SAME, AND MULTILAYER SUBSTRATE USED FOR THEM

摘要

PROBLEM TO BE SOLVED: To provide a mold member to become the mold directly used for imprint or the original of the mold directly used for imprint wherein the locations of desired step portions can be controlled and the heights of step portions are evened as to all steps of the mold. SOLUTION: The mold consists of a predetermined same element and has a structure wherein the material of the base thereof has the same crystal structure and base layers of predetermined materials having different etching rates in a predetermined etching process are laminated by a layer number not more than N. The respective base layers of the predetermined materials and the base substrate are arranged in increasing order of etching rate in the predetermined etching process from the base substrate side. COPYRIGHT: (C)2008,JPO&INPIT