| 摘要 |
PROBLEM TO BE SOLVED: To eliminate the chromatic aberration of particle lenses regarding an electrostatic corrector comprising of a rectilinear optical axis (1) and two corrective parts (8, 9), which are arranged one behind the other along the optical axis and have respective quadrupole fields and superimposed spherical lens fields. SOLUTION: Each one of two corrective units with a similar instrumental construction, is arranged on an input side and an output side equipped with two electrostatic quadrupoles. This corrective units displaced forward and backward at the same ratio of 1:1 of the axis, are arranged one behind the other along the optical axis and are rotated by 90°of the optical axis as a center one another. COPYRIGHT: (C)2008,JPO&INPIT
|
