HIGH-ENERGY ION IMPLANTATION DEVICE CONTROLLING ELECTRODE VOLTAGE PHASE BY APPLYING DIGITAL FREQUENCY SYNTHESIS AND PHASE SYNTHESIS, AND METHOD FOR CORRECTLY CALIBRATING ELECTRODE VOLTAGE PHASE

摘要

PROBLEM TO BE SOLVED: To provide an LINAC improved by utilizing direct digital synthesis (DDS) techniques to obtain precise frequency and phase control and automated electrode voltage phase calibration; and to provide an HE ion implantation system using it. SOLUTION: A DDS controller 130 may be used on an implantation process using a multi-stage linear accelerator to synchronize the frequency and phase of the electric fields to each electrode within each stage of the accelerator. The DDS controller includes digital phase synthesis (DPS) circuits 138 for modulating the phase of the electric field to the electrodes, and a master oscillator that uses digital frequency synthesis or DFS 134 to digitally synthesize a master frequency and a master phase applied to each of the DPS circuits. This method for automatically calibrating phase and amplitude of the RF electrode voltage of each stage is provided as well. COPYRIGHT: (C)2008,JPO&INPIT