| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for recovering a nozzle in which nozzle clogging can be recovered in a short time and a simple manner without causing contamination of the inside of a nozzle nor solvent shock by a coating solution and a cleaning solvent at the time of maintenance of the inner surface of the nozzle. SOLUTION: The method for recovering a nozzle is provided in which a needle 5 is moved in X-axis and Y-axis directions by a needle positioning unit 12 and positioning is made so that a center coordinate of a nozzle hole 9 is aligned with a center axis of the needle 5, and then the needle 5 is moved in a Z-axis direction (downward) by a needle driving portion 10 and inserted into the clogging part of the nozzle hole 9, thereby performing recovery of clogging. COPYRIGHT: (C)2008,JPO&INPIT
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