TRANSFER DEVICE AND TRANSFERRING METHOD

摘要

PROBLEM TO BE SOLVED: To restrict heating due to positioning of a substrate table when transferring in a transfer device for transferring a fine transfer pattern by moving a mold holder holding a mold toward the positioned substrate table holding a substrate. SOLUTION: The transfer device has: the mold holder 7 capable of holding a transferring mold M and freely moving in directions for coming close to or separating from the substrate table 15; the substrate table 15 capable of holding a substrate W and freely moving in relation to the mold holder 7; a mold holder driving means for moving the mold holder; a substrate table driving means for moving the substrate table; and a control means for controlling the substrate table driving means to reduce the holding force by the substrate table driving means so as to displace the substrate table 15 with the pushing force when pushing the substrate W with the mold M. COPYRIGHT: (C)2008,JPO&INPIT