| 摘要 |
PROBLEM TO BE SOLVED: To provide a polyimide film coating device capable of efficiently removing a polyimide liquid remaining on an ink jet head and its method. SOLUTION: This device comprises a print table on which a substrate is placed, the ink jet head placed on the top of the print table and provided with a plurality of nozzles for ejecting the polyimide liquid on the substrate, a polyimide liquid supply tank loaded with a container filled with the polyimide liquid, a wiper configured so as to move while in contact with the ejection face of the ink jet head including the plurality of nozzles, wipe the ejection face of the ink jet head and enable it to be immersed in a cleaning liquid by rotation, a cleaning liquid supply tank loaded with a container filled with the cleaning liquid, and a wiper cleaning bar provided so as to bring into contact with one face of the wiper abutting on the ink jet head and removing the cleaning liquid remaining on the wiper. COPYRIGHT: (C)2008,JPO&INPIT
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