FILM DEPOSITION EQUIPMENT AND METHOD FOR PRODUCING MAGNETIC DISC

摘要

Film deposition equipment comprises a base for holding a nonconductive substrate, and a bias applying means for applying a bias voltage to a conductive film deposited on the substrate by bringing a bias applying terminal into contact with the conductive film. The bias applying terminal is formed of a member which varies the shape depending on the temperature such as a shape memory alloy, and the bias applying terminal is brought into contact with the substrate held on the base or separated therefrom through deformation caused by temperature variation.