| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating device equipped with a ceramic base body and a heating element buried in the base body, and provided with a heating surface to process a heating object to the base body, with stabilized operation in each part of the heating device. SOLUTION: A resistance control part 2c made of a ceramics having higher volume resistivity than that of a predetermined ceramics is provided in a base body 2. The predetermined ceramics is an aluminum nitride ceramics which does not substantially contain magnesium and lithium, the other ceramics is an aluminum nitride ceramics which contains magnesium converted into an oxide of 0.5 wt.% or more, or the predetermined ceramics is an aluminum nitride ceramics which does not substantially contain magnesium and lithium, and the other ceramics is an aluminum nitride ceramics which contains lithium of 100ppm or more and 500ppm or less. COPYRIGHT: (C)2008,JPO&INPIT |
