| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of teaching reference position of a substrate transfer robot by which variation in operation due to the capability of workers can be eliminated and working time can be reduced as much as possible, in the teaching work of reference position of the substrate transfer robot. SOLUTION: The substrate transfer robot 1 carries a substrate in/from a specified place between a cassette for housing substrates and a substrate processing apparatus for processing the substrates, and it is instructed to place the substrates provided therein at a teaching position by driving a hand member 14 for placing the substrates. In this case a hand member supporting mechanism 5 is provided to prevent the hand member 14 from bending due to its dead weight, keep the vicinity of the substrate placement position and the hand member 14 not being interfered with each other inside the cassette and the substrate processing apparatus during the teaching operation, and support the hand member 14 to in-advance taught specified position. COPYRIGHT: (C)2008,JPO&INPIT
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