| 摘要 |
<P>PROBLEM TO BE SOLVED: To furthermore improve the finished accuracy of a polished surface. <P>SOLUTION: A plurality of workpieces 2 are held by means of a workpiece holder 10. The workpieces 2 are lapped by sliding them with respect to a lapping machine 1. Required lapping pressure is applied to lapping surfaces 2a by arranging weights 13 individually on the respective workpieces 2 held by the workpiece holder 10, and also an aligning operation for the weights 13 with the workpieces 2 is performed by arranging aligning members 11 between the respective weights 13 and the respective workpieces 2. <P>COPYRIGHT: (C)2008,JPO&INPIT |
