| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface treatment layer for a turbo-molecular pump which is high in plasma-resistance as well as corrosion-resistance and thermal emission, and furthermore, can be realized at a low cost. SOLUTION: The surface treatment layer formed in an inner part of the turbo-molecular pump is a double layer 24 comprising an electroless Ni plating layer 22 and an electroless black color Ni plating layer 23 which are formed on the surface of a base material 21 comprising aluminum or an aluminum alloy. COPYRIGHT: (C)2008,JPO&INPIT
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