| 摘要 |
PROBLEM TO BE SOLVED: To provide a protruded pattern forming method which easily presses a stamper against a resin layer, and sufficiently maintains the shape of the protruded pattern after removing the stamper. SOLUTION: The protruded pattern forming method comprises: a resin layer forming process for forming a resin layer 3 over an object to be processed 10; a pressing process for pressing a stamper 2 against the resin layer 3; and a removing process for removing the stamper 2 from the resin layer 3, thereby forming a protruded pattern over the object to be processed 10, wherein during the resin layer forming process, the resin layer 3 is formed using a resin material having a glass transition temperature higher than room temperature, during the pressing process, temperature control is performed such that temperatures of the resin layer 3 and the like become higher than the glass transition temperature of the resin material by 5°C or more, and during the removing process, temperature control is made such that temperatures of the resin layer 3 and the like become higher than the glass transition temperature of the resin material by 20°C or more , and are equal or approximately equal to the temperatures of the resin layer 3 and the like during the pressing process. COPYRIGHT: (C)2008,JPO&INPIT
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