发明名称 TRANSFER CHARACTERISTIC CALCULATION APPARATUS, TRANSFER CHARACTERISTIC CALCULATION METHOD, AND EXPOSURE APPARATUS
摘要 A transfer characteristic calculation apparatus for calculating a transfer characteristic of an imaging optical system includes a light source, a generation unit which generates a second signal by converting a first signal obtained by stretching an impulse signal on a space axis into a positive value using a light from the light source, a sensor which obtains an image that is output from the imaging optical system as an output signal when a light intensity distribution is inputted as the second signal, and a calculation unit which calculates the transfer characteristic of the imaging optical system by convolution of a third signal with a fourth signal that is obtained by canceling a bias component of the output signal obtained by the sensor, the third signal being an impulse signal upon convolution with the first signal.
申请公布号 US2007237253(A1) 申请公布日期 2007.10.11
申请号 US20070688408 申请日期 2007.03.20
申请人 CANON KABUSHIKI KAISHA 发明人 OISHI SATORU;INA HIDEKI
分类号 H04L23/02 主分类号 H04L23/02
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