| 摘要 |
PROBLEM TO BE SOLVED: To provide an instrument and a method for measuring highly efficiently a phase difference and a principal-axial azimuth of a film or a substrate having a double refraction, over a wide area, by parallel processing. SOLUTION: Light with a polarized light having a known polarized condition of a circular polarized wave or elliptical polarized wave is made to get incident into the measured film, and a change of the polarized condition caused by transmission thereof through the film is measured by a polarization measuring instrument combined with a polarizer patternized to make a direction of a transmission polarized light different and a photoreception element array of area sensors. The multipoint phase difference and the principal-axial direction on the film are measured collectively by this manner. COPYRIGHT: (C)2008,JPO&INPIT
|
