METHOD FOR COATING HARD FILM HAVING LOW-FRICTION CHARACTERISTICS AND PEEL RESISTANCE, AND COATED MEMBER WITH THE HARD FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for coating a hard film having low-friction characteristics, superior abrasion resistance and superior peel resistance, and to provide a member coated with such a hard film. SOLUTION: This coating method comprises the steps of: roughening the surface of a substrate 1; coating the roughened surface with a DLC film 2; and polishing the DLC film 2. Thus obtained DLC film 2 acquires improved peel resistance because a contact area between the DLC film 2 and the substrate 1 increases through roughening the surface of the substrate 1, and acquires the hard film having the low-friction characteristics through further polishing the DLC film 2. Alternatively, the hard film with high strength, peel resistance and low-friction characteristics can be obtained by the steps of: coating the surface of the substrate 1 with a diamond film; polishing the surface of the diamond film; then, coating the surface of the diamond film with the DLC film 2; and polishing the surface of the DLC film 2. COPYRIGHT: (C)2008,JPO&INPIT