| 摘要 |
<p>A processing data managing system includes: a processing device (11)(such as a sputtering device for manufacturing a magnetic disc) for repeating the same process for each cycle; a sampling unit (30) for collecting raw data on a processing condition in the processing device (such as a discharge condition); a calculation unit (100) for receiving the raw data, calculating the raw data according to a predetermined rule, and processing it as summary data expressing a characteristic point for each cycle (characteristic value: for example, average value, maximum value, minimum value, standard deviation, discharge time, and the like); a data storage unit (40) for storing the processed summary data in storage means; and a display/output unit (50) for chart-displaying the summary data stored in the storage means.</p> |
