A ROLL-TYPE DEPOSITION APPARATUS

摘要

A roll-type deposition chamber apparatus for performing a substrate depositing process on a flexible substrate such that the substrate is deposited in an easy and excellent manner is provided to protect wrinkles from being generated at the flexible substrate. A roll-type deposition chamber apparatus comprises: a base(100); a chamber(200) which is disposed on the base, and in which a sputter part is installed; a roller part(300) including a first drive roller(310) and a second drive roller which are disposed in the chamber and are unwinding or winding rollers for proceeding a flexible substrate, and a main shaft roller(330) having the flexible substrate proceeded on an outer peripheral surface thereof such that the flexible substrate proceeds between the first drive roller and the second drive roller; and a control spring part(400) for maintaining tension of the flexible substrate between the respective rollers of the roller part, wherein the control spring part includes a control spring part housing, a main control spring part, and an auxiliary control spring part, and wherein the roll-type deposition chamber apparatus further comprises a free end bar part(500) including a free end bar for applying gravity to the flexible substrate between the first drive roller and the main control spring part.