PROTECTION OF CAVITIES OPENING ONTO A FACE OF A MICROSTRUCTURED ELEMENT

摘要

The invention relates to a method of protecting the interior of at least one cavity (4) which has a part of interest (5) and which opens onto a face of a microstructured element (1), the method consisting in depositing onto said face a non-conformal layer (6) of a protective material, said non-conformal layer plugging the cavity without covering the part of interest. The invention also relates to a method of producing a device comprising such a microstructured element.