Lithographische Vorrichtung mit bewegter Linse zum Herstellen digitaler Hologramme,申请号DE20025010812-传众专利搜索

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发明名称	Lithographische Vorrichtung mit bewegter Linse zum Herstellen digitaler Hologramme
摘要
申请公布号	DE50210812(D1)	申请公布日期	2007.10.11
申请号	DE20025010812	申请日期	2002.03.28
申请人	TESA SCRIBOS GMBH	发明人	NOEHTE, STEFFEN;DIETRICH, CHRISTOPH;THOMANN, ROBERT;STADLER, STEFAN;LEIBER, JOERN
分类号	G02B5/32;G03F7/20;G03F1/08;G03H1/08;G11B7/0065;G11B7/09;G11B7/125;G11B7/135;H01L21/027	主分类号	G02B5/32
代理机构		代理人
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