METHOD OF MANUFACTURING POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a polishing pad preventing leakage of slurry and improved in optical detection accuracy.

SOLUTION: This method of manufacturing a polishing pad 8 includes processes of: manufacturing a polishing region 9 formed from a polyurethane foam body; forming an opening part 14 structured of a through hole 12 and shelf parts 13 in the polishing region; manufacturing a projecting light transmitting region 10 thinner than the polishing region; providing the light transmitting region inside the opening part of the polishing region; and attaching a transparent support film 11 to a back surface side of the polishing surface of the polishing region.

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