METHOD FOR PRODUCTION OF CARBON NANOTUBE

摘要

PROBLEM TO BE SOLVED: To provide a method by which a carbon nanotube can be grown more stably from a particulate catalyst part.

SOLUTION: The method includes: forming an insulation layer 2 comprising an SiO2film on one surface of a silicon substrate 1 (Fig. 1(a)); further forming a thin film 3 comprising a catalyst metal material on the insulation layer 2 (Fig. 1(b)); fractionating the catalyst metal thin film 3 into a plurality of particulate catalyst parts 3a by melting the catalyst metal thin film 3 in the atmosphere and then cooling (Fig. 1(c)); re-fractionating the respective catalyst parts 3a into a plurality of particulate catalyst parts 3b having a smaller size than before by heating (Fig. 1(d)); and then growing the carbon nanotube 4 from the particulate catalyst parts 3b by a thermal CVD method.

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