| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a color filter to prevent sticking of glass cullet on a surface of a substrate caused in chamfering in cutting the display substrate. SOLUTION: This manufacturing method of the display substrate 1 has: a cutting process to cut the glass substrate 1 on which a resin film is formed; and a chamfering process to chamfer a cutting surface by polishing while covering a whole surface of the substrate with water by supplying water to the surface on the side of the cut glass substrate 1 on which the resin film is formed. The method also has a plasma processing process to expose the whole surface on the side of the glass substrate on which the resin film is formed to atmospheric plasma in an atmospheric pressure or the neighborhood of the atmospheric pressure. COPYRIGHT: (C)2008,JPO&INPIT
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