| 摘要 |
PROBLEM TO BE SOLVED: To provide a photochemical treatment device having an increased length without reducing photo-cleaning efficiency. SOLUTION: The photochemical treatment device is provided with a plurality of tubular UV (ultraviolet) sources 2 arranged in parallel on a cycle T and for irradiating a substrate to be treated 1 with the UV, an electrode applying high-frequency voltage to the UV sources, a light tool 3 retaining the UV sources, a light source housing chamber 5 housing the UV sources 2 and retaining the oxygen free atmosphere, an irradiation window 4 installed in the light source housing chamber 5 and transmitting the UV radiated from the UV sources 2, and a supporting shaft 4b installed at at least one place in the lower side among a plurality of the UV sources and supporting the irradiation window 4 in the shaft direction of the plurality of the UV sources 2. COPYRIGHT: (C)2008,JPO&INPIT
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