| 摘要 |
A device for measuring thickness of a glass substrate is provided to measure thickness of a thin flat panel display accurately even while the glass substrate is being transported by installing plural displacement sensors perpendicular to transport path of the glass substrate and radiating waves and receiving the reflected waves to calculate the thickness of the flat panel display. A device for measuring thickness of a glass substrate comprises a plurality of sensors installed perpendicular to the transport path of a glass substrate(GL) wherein the sensors are disposed on the surface side and on the opposite side of the glass substrate, a first unit calculating the distance between the sensors and the glass substrate on the basis of the signals from the each sensors, a second unit calculating the thickness of the glass substrate being transported on basis of the calculated value from the first unit and the distance between two predetermined sensors(D0). The sensors are displacement sensors transmitting radiant waves at a regular time intervals and receives the reflected waves. The reflected waves are waves reflected off the outer surface of the glass substrate. A PLC(Programmable Logic Controller) unit acquiring the thickness of the glass substrate calculated by the second unit. The sensors include a radiating unit(TR) emitting a laser beam, a light receiving unit(RV) receiving the reflected waves. The light receiving unit has a CCD(Charge Coupled Devices). |
