| 摘要 |
PROBLEM TO BE SOLVED: To provide a polyimide film coating device and its method that can eliminate a pinhole defect and bleeding of a line by efficiently removing polyimide liquid remaining on an ink jet head. SOLUTION: The polyimide film coating device includes a printing table, the ink jet head, a polyimide liquid supply tank, and a wiper, and one surface of the wiper which comes into contact with a jet surface of the ink jet head is formed of an inclined surface having a predetermined angle of inclination. The polyimide film coating method includes the stages of: placing a substrate; loading a container in the polyimide liquid supply tank; jetting the polyimide liquid onto the substrate; and wiping a nozzle of the ink jet head by using the wiper having the inclined surface. COPYRIGHT: (C)2008,JPO&INPIT |
