| 摘要 |
PROBLEM TO BE SOLVED: To provide a modulated multi tape lapping device which facilitates addition and elimination of a shoe assembly, a polishing material-coated tape and a tape holder in response to a change of the number of machining positions of the outer surface or the inner surface of a machined material without remodeling the whole of a unit including a dedicated series of several shoe assemblies, the polishing material-coated tape, and the tape holder. SOLUTION: There are integrally assembled as a replaceable arm module 20: a cassette main body 1 fitted to a pair of straight moving slides 11 and 12, which are respectively fixed to a machine main body 10, freely to move in a Z-axis direction toward the machined material; a pair of opening/closing arms 6 and 6, which are arranged around an arm opening/closing shaft fitted to the cassette main body 1, freely to open and close; shoe assemblies 5 and 5 having a pair of relatively rigid recessed surfaces for pushing the polishing material-coated tape by bringing the polishing material-coated tape supported by the pair of opening/closing arms 6 and 6 in contact with a shaft surface 4 of the machined material 2; and an arm opening/closing clamp cylinder 7. COPYRIGHT: (C)2008,JPO&INPIT |
