发明名称 NON-VOLATILE MEMORY AND METHOD OF MANUFACTURING SAME
摘要 PROBLEM TO BE SOLVED: To provide a non-volatile memory that suppresses the leakage current of a ferroelectric substance and can be used stably, and to provide a method of manufacturing the non-volatile memory. SOLUTION: The memory cell of the non-volatile memory 1 comprises: a cell selection transistor 5, and a ferroelectric capacitor 2 connected to the cell selection transistor 5 electrically. The ferroelectric capacitor 2 comprises: a lower electrode 15; a ferroelectric film 17 that is formed on the lower electrode 15, and contains a magnetic element; and an upper electrode 19 formed on the ferroelectric film 17. The non-volatile memory 1 is formed by applying a magnetic field of 10 kOe in a direction vertical to the surface of the ferroelectric film 17 and heating to 400°C. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007266407(A) 申请公布日期 2007.10.11
申请号 JP20060090972 申请日期 2006.03.29
申请人 FUJITSU LTD 发明人 SATO KEISUKE;KONDO MASAO
分类号 H01L21/8246;H01L27/105 主分类号 H01L21/8246
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