发明名称 SUBSTRATE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To mount a thermocouple provided with a protecting tube to a reaction tube, while preventing the thermocouple from falling. SOLUTION: A horizontal part 60 is protruded at a transverse tube of an elbow-tube protecting tube 52 of the thermocouple 50 provided with a protecting tube, while a vertical part 61 is provided at a longitudinal tube. A holding member 54 is provided for covering a half of the lower side of the transverse tube of the protecting tube 52. A through-hole 57 and a notch 58 are opened in the holding member 54, and the holding member 54 is applied to the transverse tube of the protecting tube 52 so as to fit the horizontal part 60 into the through-hole 57, and to fit the vertical part 61 into the notch 58. The thermocouple 50, provided with a protecting tube to which the holding member 54 is applied, is inserted into a mounting aperture 62 opened large on the side wall of the reaction tube 24 of an oxidization/dispersion device from the inside, so as to fix it to the reaction tube 24 by a tube coupling 65. It is possible to prevent the thermocouple 50 that is provided with a protecting tube from falling by the holding member 54. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007266118(A) 申请公布日期 2007.10.11
申请号 JP20060086367 申请日期 2006.03.27
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 OOURA YOSHITAKA
分类号 H01L21/31;C23C16/46;H01L21/22 主分类号 H01L21/31
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