| 摘要 |
PROBLEM TO BE SOLVED: To provide a method enabling high-quality parameterizability and regulating performance over a considerably wide frequency bandwidth of a vibration isolation system to be regulated. SOLUTION: Some of provided sensor signals are digitized, and by processing the sensor signals, an actuator actuation signal is generated (20). An analogue actuator actuation signal is generated (30) by processing other sensor signals provided in an analogue manner. When the digital actuator actuation signal and the analogue actuator actuation signal are combined (40), a common actuator actuation signal driving an actuator (50) is generated. COPYRIGHT: (C)2008,JPO&INPIT
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