发明名称 Method for making an improved thin film solar cell interconnect using etch and deposition processes
摘要 The present invention provides a method of forming interconnects in a photovoltaic module. According to one aspect, a method according to the invention includes processing steps that are similar to those performed in conventional integrated circuit fabrication. For example, the method can include masks and etches to form isolation grooves between cells, and additional etches to form a conductive step adjacent to the grooves that can be used to form interconnects between cells. According to another aspect the method for forming the conductive step can be self-aligned, such as by positioning a mirror above the module and exposing photoresist from underneath the substrate at an angle one or more times, and etching to expose the conductive step. According to another aspect, the process can include steps to form grid lines in the module to improve current transport in the structure.
申请公布号 US2007238285(A1) 申请公布日期 2007.10.11
申请号 US20060394723 申请日期 2006.03.31
申请人 APPLIED MATERIALS, INC. 发明人 BORDEN PETER
分类号 H01L21/4763 主分类号 H01L21/4763
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