| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a non-lead based piezoelectric element (piezoelectric thin film), and to improve the characteristics of the same. <P>SOLUTION: An ink jet type recording head, including a piezoelectric element PE, comprises a substrate 1 having a plurality of pressure chambers 1a; a vibrating plate 3 formed thereabove; a first electrode 5 formed thereabove; a first piezoelectric film 7 formed thereabove; a second electrode 9 formed thereabove; a second piezoelectric film 11 formed thereabove; and a third electrode 13 formed thereabove. The first and second piezoelectric films 7, 11 comprise a BNT film ((Bi, Na, Ba)TiO<SB>3</SB>). More preferably, Li or K is doped to the BNT film. <P>COPYRIGHT: (C)2008,JPO&INPIT |
