| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS actuator which easily oscillates an oscillation member at high speed and with a large amplitude, scans an object to be scanned in the main scanning direction, is miniaturized, and is provided at low cost. SOLUTION: The MEMS actuator is provided with oscillation members 13A and 13B which oscillate an oscillation member (a micromirror) 12 about a first axis; second movable electrodes 21A and 21B provided on the oscillation member; and second fixed electrodes 22A and 22B provided on a substrate so as to face to a second movable electrode along the axis direction of the oscillation member, wherein the axis of the oscillation member, the oscillation member, the second movable electrodes and the second fixed electrodes are arranged on substantially the same plane, an AC power source 40 applies a second AC voltage between the second movable electrodes and the send fixed electrodes, so that the oscillation member is oscillated also about the axis, which intersects at right angles with the oscillation member by electrostatic force generated by applying the second AC voltage. COPYRIGHT: (C)2008,JPO&INPIT |
