| 摘要 |
PROBLEM TO BE SOLVED: To provide an elastic boundary element, resonator and filter capable of suppressing a Stoneley wave appearing in frequencies adjacent to that of an elastic boundary wave used as a function of the elastic boundary wave element. SOLUTION: This invention is provided with a LiNbO<SB>3</SB>substrate 10, an electrode 16 provided on the substrate 10 for exciting an elastic wave, a silicon oxide film 12 provided on the substrate 10 so as to cover the electrode 16. In the elastic boundary wave element, the resonator and the filter; the cut angle of a rotation Y of the substrate 10, a density ratio of the electrode 16 to Cu, a length of the elastic wave excited by the electrode 16, a film thickness of the electrode 16, and that of the silicon oxide film 12, are set to be with in a range in which an electromechanical coupling coefficient of the stoneley wave is 0.00015 and below. COPYRIGHT: (C)2008,JPO&INPIT
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