| 摘要 |
PROBLEM TO BE SOLVED: To make a composition simple and compact, and to improve measurement precision. SOLUTION: A dew point meter is composed of a spherical base material 11 and a propagation path 12 which is formed on the surface of the spherical base material 11 such that a surface acoustic wave can propagate so as to revolve. A surface temperature of the propagation path 12 is controlled so as to drop from a set temperature, and a dew formation of a gas to be measured 12 on the propagation path 12 is determined by a control/analysis/display section 19 when the propagation velocity of the surface acoustic wave changes quickly and inversely in the downward direction from such a state that it changes at a certain rate in the upward direction, based on the dropping temperature and the propagation velocity of the propagation path 12 which changes along with the dropping control for the set temperature. Then, a dew point of the gas to be measured is calculated by the control/analysis/display section 19, based on the set temperature, the propagation velocity of the surface acoustic wave when the dew formation is determined, and a value of change in the propagation velocity when it changes at the certain rate in the upward direction. COPYRIGHT: (C)2008,JPO&INPIT
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