| 摘要 |
PROBLEM TO BE SOLVED: To provide an adjusting method for a thickness measuring instrument, capable of evaluating the angle and the positional shift in measuring axis, in a range finder arranged opposite, capable of regulating the angle and the positional shift to eliminate error factors, and capable of accurately measuring the thickness, and to provide a device therefor. SOLUTION: This adjusting method is provided with a process for moving a calibration plate, located within a measuring range of the range finder at the first optional angle; a process for moving the calibration plate at the second optional angle; a process for finding the first variation by measuring respectively the distances, before and after the moving when moving the calibration plate at the first optional angle, by the range finder; a process for finding the second variation by measuring respectively distances, before and after the moving when moving the calibration plate at the second optional angle, by the range finder; a process for finding an angle deviation between a distance measuring direction and a moving axis of the calibration plate, based on a difference between the first variation and the second variation; and a process for adjusting the distance measuring direction, based on the deviation. COPYRIGHT: (C)2008,JPO&INPIT
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