| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring substrate usable in X-ray diffraction measurement, even in a trace amount of sample. SOLUTION: This silicon substrate for the X-ray diffraction measurement has one or more of recessed portions in the substrate, a substrate thickness in a bottom of the each recessed portion is within a range of 0.1-100μm, and a substrate thickness excepting the recessed portion is within a range of 280-1000μm. COPYRIGHT: (C)2008,JPO&INPIT
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