VISUAL INSPECTION METHOD AND VISUAL INSPECTION DEVICE FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a visual inspection method and a visual inspection device therefor improving substrate manufacturing yield by enabling determination of the flaws and pits on the surface of a substrate and accurate quality determination of the substrate. SOLUTION: This visual inspection method for the substrate includes the following processes (1) to (3): (1) A process for obtaining linear polarized light by passing light from a light source L through a first polarizing plate 3A having a light absorbing axis in one direction. (2) A process for emitting the linear polarized light to one side of an inspection subject substrate 1. (3) A process for arranging a second polarizing plate 3B having a light absorbing axis to absorb the linear polarized light having passed through the inspection subject substrate 1 on the other side of the inspection subject substrate 1 and for determining the flaws and pits on the surface of the substrate by contrast displayed on the second polarizing plate 3B. COPYRIGHT: (C)2008,JPO&INPIT